Abstract. One-stage laser interferential chemical deposition of thin film periodical micro- and nanostructures from vapor phase without application of photolithography masks is studied experimentally. The experimental setup includes YAG:Nd3+ laser, vacuum chamber for process of structure deposition from volatile metal’s carbonyl vapor with transparent window for inletting laser irradiation into the chamber, opticalmechanical set to split the initial front into two coherent beams forming two-beam interference pattern on surface of transparent substrate. Dirhenium decacarbonyl is used as typical metalorganic compound. Results of the experiments are used to test a theoretical model describing the process of onestage laser interferential chemical deposition from vapor phase; in accordance with the model, the critical point is shown to be the pyrolysis process taking place mainly in the monolayer of carbonyl molecules adsorbed on the surface of transparent substrate. Application of two-beam interference is reported to provide a higher resolution of periodic topological pattern than projection photolithography and direct laser drawing.

Keywords: two-beam interference, carbonyls, laser chemical deposition, adsorbed layers, diffraction grating, submicron periodical structures

References:

1. Kostsov E. G. Optoelectronics, Instrumentation and Data Processing, 2009, no. 3(45), pp. 3–52. (in Russ.)
2. Veyko V.P., Libenson M.N. Physics and Chemistry of Materials Treatment, 1968, no. 4, pp. 44–50. (in Russ.)
3. Veyko V.P. Lazernaya obrabotka plenochnykh elementov (Laser Processing of the Film Elements), Leningrad, 1986, 248 p. (in Russ.) 
4. Won-Tien Tsang, Shyh Wang. Applied Physics Letters, 1974, no. 4(24), pp. 196–199.
5. Won-Tien Tsang, Shyh Wang. Applied Physics Letters, 1974, no. 7(25), pp. 415–418.
6. Won-Tien Tsang, Shyh Wang. Applied Physics Letters, 1975, no. 2 (27), pp. 79–82.
7. Smith H.I. Physica E, 2001, no. 11, pp. 104–109.
8.  Brueck S.R.J. Proceedings of the IEEE, 2005, no. 10(93), pp. 1704–1721.
9. Certificate of Authorship no. 1331369 USSR, H 01 L 21/312, G 03 F 1/00. Chesnokov V.V., Zemskov S.V., Igumenov I.K. Sposob lokal'nogo naneseniya pokrytiya na podlozhku (The Local Coating on a Substrate), Priority 6.06.85, Bulletin no. 30, 1987, pр. 260. (in Russ.)
10. Chesnokov V.V., Reznikova E.F. Tezisy dokladov IX Vsesoyuz. konf. "Fizika vakuumnogo ul'trafioleta i ego vzaimodeystvie s veshchestvom" (Proc. of the IX all-USSR Conf. "Physics of vacuum ultraviolet radiation and its interaction with matter", Abstracts of Papers), Tomsk, 1991, pp. 137–138. (in Russ.)
11. Chesnokov D.V. Razrabotka i issledovanie nanosekundnoy lazernoy mikrotekhnologii formirovaniya optoelektronnykh struktur (Development and Investigation of Nanosecond Laser Microfabrication Techniques for the Formation of Optoelectronic Structures), Extended abstract of candidate’s thesis, Novosibirsk, 2000.
12. Chesnokov D.V. Sbornik trudov VII mezhdunar. konf. "Prikladnaya optika – 2006"( Proc. of VII Intern. Conf. "Applied optics – 2006"), St. Petersburg, 16–20 October 2006, vol. 2 "Optical materials and technologies", pp. 125–129. (in Russ.)
13. Chesnokov V. V., Chesnokov D. V. Tez. dokl. Ross. konf. i shkoly po aktual'nym problemam poluprovodnikovoy nanofotoelektroniki "Fotonika–2011" (Proc. of  Russian conf. and School on Actual Problems of Semiconductor Nanooptoelectronics "Fotonika–2011"), Russia, Novosibirsk, 22–26 August 2011, pp. 80. (in Russ.)
14. Chesnokov D.V., Chesnokov, V.V. Proc. of 5th Intern. Conf. on Actual Problems of Electron. Instrum. Eng. "APEIE-2000" , Russia, Novosibirsk, 26–29 September 2000, pp. 42–46.
15. . Chesnokov V. V., Chesnokov D. V., Reznikova E. F. Lazernye nanosekundnye mikrotekhnologii (Nanosecond Laser Microtechnology), Moscow–Novosibirsk, 2003, 300 p. (in Russ.)
16. Akhmanov S.A., Nikitin S.Yu. Fizicheskaya optika (Physical Optics), Moscow, 1998, 656 р. (in Russ.)