Abstract. Based on the spectrum analysis of the ellipsometry angles obtained with photometric spectral ellipsometer «El`f», an investigation of size dependences for the refractive index and absorption index of nanosized ethanol film deposited on a silicon substrate and a glass substrate is performed. The refractive index is found to decrease monotonically with the film thickness in the thickness range under investigation. In the region of 85–140 nm for the glass substrate and 120–150 nm for the silicon substrate, a rather sharp decrease in the absorption coefficient was observed with a decrease in the film thickness. It is assumed that for the refractive index such an effect occurs only in the range of smaller film thicknesses.

Keywords: refractive index and absorption index, size dependence, ellipsometry, nanosized liquid film

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