Changing the Surface Roughness Parameters of Microchannel Plate Workpieces at Various Stages of Mechanical Processing

The change in the arithmetic mean deviation of the estimated profile of the blanks of microchannel plates at the stages of mechanical processing by the semi-contact method on a scanning probe microscope is investigated. A method for controlling changes in the surface roughness of blanks of microchannel plates at the stages of diamond disc cutting, grinding and polishing is presented. It is shown that the proposed method for controlling the structure parameters using AFM image analysis of the surface of microchannel workpieces can be used for quantitative analysis of the morphology and topography of samples in the nano- and micrometer ranges when changing materials or machining technology in order to reduce processing time and increase productivity at the stages of grinding and polishing.

1. Bochkin I.O. Mekhanicheskaya obrabotka poluprovodnikovykh materialov (Mechanical Processing of Semiconductor Materials), Moscow, 1983. (in Russ.)

2. Pererozin M.A. Spravochnik po almaznoy obrabotke stekla (Handbook of Diamond Processing of Glass), Moscow, 1987, 224 р. (in Russ.)

3. Smirnov V.A. Obrabotka opticheskogo stekla (Optical Glass Processing), Leningrad, 1969, 144 р. (in Russ.)

4. Obeid A. Journal of Optical Technology, 2005, no. 12(72), pp. 951–953, https://doi.org/10.1364/JOT.72.000951.

5. Dubovoy A.N., Kulakov V.A., Nosov S.A., Gavrishchuk E.M., Timofeev O.V. Tezisy dokladov XVII Rossiyskogo simpoziuma po rastrovoy elektronnoy mikroskopii i analiticheskim metodam issledovaniya tverdykh tel (Abstracts of the XVII Russian Symposium on Scanning Electron Microscopy and Analytical Methods for Solid State Research), Chernogolovka, 2011, рр. 84. (in Russ.)

6. Mironov V.L. Osnovy skaniruyushchey zondovoy mikroskopii (Fundamentals of Scanning Probe Microscopy), Nizhny Novgorod, 2004, 110 р. (in Russ.)

7. Vinokurov V.M. Issledovaniye protsessa polirovki stekla (Study of the Glass Polishing Process), Moscow, 1967, 196 р. (in Russ.)

8. Brandon D., Kaplan W.D. Microstructural Characterization of Materials, John Wiley & Sons, 2013. 560 р.

9. Pavlushkin N.M., Sentyurin G.G., Khodakovskaya R.Ya. Praktikum po tekhnologii stekla i sitallov (Workshop on Glass and Ceramic Glass Technology), Moscow, 1970. (in Russ.)

10. Lutsenko A.N., Odintsev I.N., Grinevich A.V., Severov P.B., Plugatar’ T.P. Aviatsionnyye materialy i tekhnologii, 2014, no. S4, pp. 70–86, DOI: 10.18577/2071-9140-2014-0-s4-70-86. (in Russ.)

11. Zolotarev V.M. Optics and Spectroscopy, 2022, no. 12(130), pp. 1600–1610.