DOI 10.17586/0021-3454-2016-59-12-1043-1048
UDC 621.7.077, 681.513.3
STUDY OF STAGE WITH THE BIMORPH PIEZO-ACTUATORS
St. Petersburg State Polytechnical University, Department of Automatic Machinery;
D. H. P
Peter the Great St. Petersburg Polytechnic University; Post-Graduate Student
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Abstract. Variants of multi-axis platforms used in devices for object micro-positioning are analyzed. A microscope XY-stage with parallel kinematic and piezoelectric drive based on bimorph actuators is recommended. Results of experimental study of the XY-stage are presented and conclusions are formulated.
Keywords: XY-stage, design, bimorph piezoelectric actuators, experiments, micro displacement, voltage, hysteresis
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