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8
Issue
vol 60 / AUGUST, 2017
Article

DOI 10.17586/0021-3454-2017-60-8-797-800

UDC 658.512.2-52

METHODS AND MEANS OF CONTROL OF THE DYNAMIC CHARACTERISTICS OF INERTIAL MICROMECHANICAL SENSORS AND MODULES

D. G. Gryazin
State Research Center of the Russian Federation Concern CSRI Elektropribor, JSC; ITMO University;


Abstract. An experience in development of complex specialized bench equipment to control frequency characteristics of the MEMS gyroscopes, accelerometers, and inertial based-on modules is described. Analyzes Peculiarities of the stands structures is analyzed, some trends in further development of stands are discussed.
Keywords: test bench, control, accuracy, frequency characteristics, micromechanics, gyroscope, accelerometer

References:
  1. Gryazin D.G. Trudy chetvertoy vserossiyskoy mul'tikonferentsii po problemam upravleniya (Proceedings of the 4th all-Russia Multiconference on Management Problems), 2011, vol. 2, рр. 313–315. (in Russ.)
  2. Chekmarev A.B, Gryazin D.G. Mehatronika, Avtomatizacia, Upravlenie (Mechatronics, Automation, Control), 2013, no. 10, pp. 51–58. (in Russ.)