DOI 10.17586/0021-3454-2019-62-3-285-290
UDC 53.083.64: 62
USING THE SOLC OPTICAL FILTER FOR DETERMINATION OF CRYSTALLINE PLATES THICKNESS
Far Eastern State Transport University, Department of Automatics, Tele-mechanics and Communication; Senior Lecturer ;
P. S. Goncharova
Far Eastern State Transport University, De-partment of Physics and Theoretical Mechanics ;
N. V. Sidorov
I. V. Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center of the RAS, Laboratory of Materials for Electronic Engineering, Sector of Vibrational Spectroscopy and Structural Studies; Head of the Sector ;
M. N. Palatnikov
Dr. Sci.; I. V. Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center of the RAS, Laboratory of Materials for Electronic Engineering, Sector of Solid-State Materials of Acoustic and Optoelectronics; Head of the Sector;
A. V. Syuy
Far Eastern State Transport University, De-partment of Physics and Theoretical Mechanics; Head of the Department;
A. I. Livashvili
PhD, Associate Professor; Far Eastern State Transport University, De-partment of Higher Mathematics ;
V. V. Krishtop
Perm Research and Production Instrument Making Company, Research Institute of Radio Photonics and Optoelectronics; Chief Researcher; professor
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Abstract. A new method for increasing the accuracy of measuring the difference in the thicknesses of two anisotropic plates using the Solc interference filter is proposed. Non-monochromatic radiation, after passing through the crossed Solc filter, has a periodic distribution of radiation intensity over wavelengths. The distance between neighboring radiation minima is proposed to be used for a rough estimate, and the study of polarization parameters of the radiation makes it possible to refine the obtained data. This method allows to determine a crystal plate thickness with an accuracy of 0.1 μm.
Keywords: interference polarization filter, effective thickness, polarization, ellipsometry, phase difference
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