DOI 10.17586/0021-3454-2019-62-7-654-658
UDC 531.7.082.5; 535.42/44
METHOD OF LINEAR DISPLACEMENT MEASURING USING OPTICAL RASTER ILLUMINATED BY SPHERICAL WAVE FRONT
ITMO University;
Y. V. Fedorov
ITMO University, Department of Measurement Technologies and Computer Tomograph;
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Abstract. A new method for measuring linear displacements based on illumination of optical raster by a spherical wave front formed by a point hole is presented. The proposed method allows to measure the raster movement with an error of about 0.001 %. It is shown that the proposed scheme has a large displacement transformation coefficient and allows to register small displacements of the raster.
Keywords: diffraction, point source, measurement of the linear displacement, optical raster, spherical wave front
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