DOI 10.17586/0021-3454-2019-62-7-654-658
UDC 531.7.082.5; 535.42/44
METHOD OF LINEAR DISPLACEMENT MEASURING USING OPTICAL RASTER ILLUMINATED BY SPHERICAL WAVE FRONT
ITMO University;
Y. V. Fedorov
ITMO University, Department of Measurement Technologies and Computer Tomograph;
Read the full article
Abstract. A new method for measuring linear displacements based on illumination of optical raster by a spherical wave front formed by a point hole is presented. The proposed method allows to measure the raster movement with an error of about 0.001 %. It is shown that the proposed scheme has a large displacement transformation coefficient and allows to register small displacements of the raster.
Keywords: diffraction, point source, measurement of the linear displacement, optical raster, spherical wave front
References:
References:
- Dobosz M., Zamiela G. Optics & Laser technology, 2012, vol. 44, pp. 1620 1628.
- Benyong Chen et al. Optic Express, 2010, no. 3(18), рр. 3000 3010.
- Bo Zhao et al. Proc. of SPIE, 2015, vol. 9446, рp. 94464J-1 94464J-7.
- Shuangshuang Zhao et al. Applied Optics, 2011, no. 10(50), pp. 1413 1416.
- Fisher J., Radil T. Measurement Science Review, 2003, vol. 3, рp. 37 40.
- Fisher J., Radil T. Proceedings of the XVIII Imeko World Congress, 2006, рp. 18 25.
- Zakirov A.K. et al. Proc. of SPIE, 2017, vol. 10334, рp. 103340L-1 103340L-6
- Voznesensky N.B., Gavrilov E.V., Kirillovskiǐ V.K., Zhevlakov A.P., Orlov P.V. Technical Physics. The Russian Journal of Applied Physics, 2007, no. 2(52), pp. 271–275.
- Klimov A.Yu., Rogov V.V., Salashchenko N.N., Chkhalo N.I. Bulletin of the Russian Academy of Sciences: Physics, 2008, no. 2(72), pp. 204–206.