DOI 10.17586/0021-3454-2019-62-7-675-680
UDC 681.586
NEW TECHNOLOGICAL TECHNIQUE ENSURING RELIABILITY AND STABILITY OF OUTPUT PARAMETERS OF MICROMECHANICAL PRESSURE SENSORS
ITMO University; Professor
M. E. Kalinkina
ITMO University, Saint Petersburg, 197101, Russian Federation; Postgraduate
R. Y. Labkovskaya
ITMO University; student
A. G. Korobeynikov
Saint Petersburg Branch Organization of the Russian Academy of Sciences “Institute of Earth Magnetism, Ionosphere and Radio waves named after N.V. Pushkov RAS”;ITMO University, Saint Petersburg, 197101, Russian Federation ; Deputy Director for Science
O. I. Pirozhnikova
ITMO University; Ph.D.
A. S. Kozlov
ITMO University, Department of Computer System Design and Security; Post-Graduate Student
Read the full article
![](/images/pdf.png)
Abstract. A new technological method ensuring characteristics of reliability and stability of the output parameters of micromechanical pressure sensors is presented. The reliability parameters of sensitive elements of pressure sensors are calculated. Results of autonomous accelerated tests and tests for reliability are demonstrated.
Keywords: microelectromechanical systems, pressure sensors, sensing element
References:
References:
- Shikul'skaya O., Shikul'skiy M. Modelirovaniye datchikov (Sensor Simulation), Moscow, 2012, 496 р. (in Russ.)
- Klaassen K.B. Electronic Measurement and Instrumentation, NY, IBM Almaden Research Center, 1996.
- Kazaryan A.A. Plenochnyye datchiki davleniya (Film Pressure Sensors), Moscow, 2006, 320 р. (in Russ.)
- Afonskiy A.A., D'yakonov V.P. Izmeritel'nyye pribory i massovyye elektronnyye izmereniya (Measuring Instruments and Mass Electronic Measurements), Moscow, 2012, 548 р. (in Russ.)
- Raspopov V.Ya. Mikromekhanicheskiye pribory (Micromechanical Devices), Moscow, 2007, 400 р. (in Russ.)
- Konyukhov N.E., Mednikov F.M., Nechayevskiy M.L. Elektromagnitnyye datchiki mekhanicheskikh veli-chin (Electromagnetic Sensors of Mechanical Quantities), Moscow, 1987, 254 р. (in Russ.)
- Achil'diyev V.M., Gruzevich Yu.K., Soldatenkov V.A. Informatsionnyye izmeritel'nyye i optiko-elektronnyye sistemy na osnove mikro- i nanomekhanicheskikh datchikov uglovoy skorosti i lineynogo uskoreniya (Information Measuring and Opto-Electronic Systems Based on Micro- and Nanomechani-cal Sensors of Angular Velocity and Linear Acceleration), Moscow, 2016, 264 р. (in Russ.)
- Kalashnikov V.I., Nefedov S.V. Elektronika i mikroprotsessornaya tekhnika (Electronics and Micropro-cessor Technology), Moscow, 2012, 368 р. (in Russ.)
- Lavrent'yev B.F. Skhemotekhnika elektronnykh sredstv (Electronic Circuit Design), Moscow, 2010, 336 р. (in Russ.)
- Ermuratskiy P.V., Lychkina G.P., Minkin Yu.B. Elektrotekhnika i elektronika (Electrical and Electronics), Moscow, 2011, 416 р. (in Russ.)
- Labkovskaya R.Ya., Kozlov A.S., Pirozhnikova O.I., Korobeynikov A.G. Cybernetics and Programming, 2014, vol. 5, pp. 70
- Korobeynikov A.G., Grishentsev A.Yu. Razrabotka i issledovaniye mnogomernykh matematicheskikh modeley s ispol'zovaniyem sistem komp'yuternoy algebry (Development and Research of Multidimen-sional Mathematical Models Using Computer Algebra Systems), St. Petersburg, 2014, 100 р. https://elibrary.ru/download/elibrary_26121279_54604165.pdf. (in Russ.)
- Bakanov F., Sokolov S.S. Konstruirovaniye i proizvodstvo radioapparatury (Design and Manufacture of Radio Equipment), Moscow, 2011, 384 р. (in Russ.)
- Averchenkov O.E. Skhemotekhnika. Apparatura i programmy (Circuitry. Equipment and Software), Moscow, 2012, 588 р. (in Russ.)
- Ageyev O.A., Petrov V.V. Informatsionno-izmeritel'naya tekhnika i elektronika. Preobrazovateli neelek-tricheskikh velichin (Information and Measuring Equipment and Electronics. Non-Electric Transduc-ers), Moscow, 2018, 158 р. (in Russ.)
- Kalinkina М.Е., Kozlov A.S., Labkovskaya R.Y., Pirozhnikova О.1., Tkalich V.L. IOP Conference Series: Materials Science and Engineering, 2018, no. 3(450), рр. 032004.