Abstract. Measuring circuits of differential capacitive parametric converters intended for taking information about inertial mass oscillations of accelerometers or gyroscopes are considered. Error analysis of the measuring circuit based on operational amplifier is carried out, and ways of reduction of each of the con-sidered components of the resulting error are outlined. Schematics of measuring circuits providing trans-formation of informative parameter of the differential capacitive sensor and correction of the error caused by imperfection of the operational amplifier are presented. It is noted that the scope of measurement cir-cuits without an operational amplifier is limited by a narrow range of working capacitance; structures built on an operational amplifier have a linear conversion function regardless of the deviation of the working ca-pacitance.

Keywords: measuring circuit, capacitive differential sensor, accelerometer, gyroscope, error, chan-nel phase separation

References:

1. Aleshin B.S., Veremeyenko K.K., Chernomorskiy A.I., ed., Oriyentatsiya i navigatsiya podvizhnykh ob"yektov: sovremennyye informatsionnyye tekhnologii (Orientation and Navigation of Moving Objects: Modern Information Technology), Moscow, 2006, 424 р. (in Russ.)
2. Topil'skiy V.B. Mikroelektronnyye izmeritel'nyye preobrazovateli (Microelectronic Transducers), Moscow, 2012, 493 р. (in Russ.)
3. Raspopov V.Ya. Mikromekhanicheskiye pribory (Micromechanical Devices), Moscow, 2007, 400 р. (in Russ.)
4. Dmitriyenko A.G., Nikolayev A.V., Lyashenko A.V., Tyurin M.V., Yaroslavtseva D.A. Measuring. Monitoring. Management. Control, 2018, no. 2(24), pp. 5–13. (in Russ.)
5. Karpov V.A., Khananov V.A. Bulletin of Sukhoi State Technical University of Gomel, 2013, no. 3, pp. 58–62. (in Russ.)
6. Svistunov B.L. Measuring. Monitoring. Management. Control, 2017, no. 2(20), pp. 94–100. (in Russ.)
7. Chernetsov M.V., Churakov P.P. Measuring. Monitoring. Management. Control, 2018, no. 1(23), pp. 11–17. (in Russ.)
8. Levshina E.S., Novitskiy P.V. Elektricheskiye izmereniya fizicheskikh velichin (izmeritel'nyye preobrazovateli) (Electrical Measurements of Physical Quantities (Measuring Transducers)), Leningrad, 1983, 320 р. (in Russ.)
9. Grinevich F.B., Grokhol'skiy A.L., Sobolevskiy K.M., Tsapenko M.P. Transformatornyye izmeritel'nyye mosty (Transformer Measuring Bridges), Karandeyev K.B., ed., Moscow, 1970, 280 р. (in Russ.)
10. Volovich A., Volovich G. Components & Technologies, 2002, no. 1. (in Russ.)
11. Tas N., Sonnenberg T., Jansen H., Legtenberg R., Elwenspoek M. J. of Micromechanics and Мicroengineering, 1996, no. 4(6), pp. 385–397.
12. Maubodian R., Howe R.T. J. of Vacuum Science and Technology B, 1997, no. 1(15), pp. 1–20.
13. Averin I.A., Pautkin V.E. University Proceedings. Volga Region. Technical Sciences, 2014, no. 2, pp. 24–32. (in Russ.)
14. Pospelov A.V. Measuring. Monitoring. Management. Control, 2002, no. 1. (in Russ.)
15. Arbuzov V.P. Strukturnyye metody povysheniya tochnosti izmeritel'nykh tsepey yemkostnykh i induktivnykh datchikov (Structural Methods for Improving the Accuracy of Measuring Circuits of Capacitive and Inductive Sensors), Penza, 2008, 230 р. (in Russ.)
16. Nekrasov Ya.A, Belyayeva T.A., Belyayev Ya.V., Bagayeva S.V. Nauchnoe Priborostroenie (Scientific Instrumentation), 2008, no. 1(18), pp. 91–97. (in Russ.)
17. Karpov V.A., Khananov V.A. Bulletin of Sukhoi State Technical University of Gomel, 2014, no. 1, pp. 91–96. (in Russ.)
18. Arbuzov V.P. Izmeritel'nyye tsepi yemkostnykh datchikov (Measuring Circuits for Capacitive Sensors), Penza, 2002, 134 р. (in Russ.)
19. Arbuzov V.P., Mishina M.A. Journal of Instrument Engineering, 2017, no. 12(60), pp. 1138–1145. (in Russ.)