Reference for citation: Maiorov E. E., Borodyansky Yu. M., Kurlov V. V., Tayurskaya I. S., Pushkina V. P., Guliyev R. B. Spatial micro-scanning of plane-parallel glass plate surface by the interference method. Journal of Instrument Engineering. 2023. Vol. 66, N 8. P. 688—695 (in Russian). DOI: 10.17586/0021-3454-2023-66-8-688-695.

Abstract. Plane-parallel glass plates for spatial micro-scanning of the surface by the interference method are studied. The need to control the quality of optical surfaces for high-precision optical instruments and systems determines the relevance of the work. The appearance of the interferometer is presented, the optical scheme and technical characteristics of the device are given. As a result of experimental measurements, interferograms of the surfaces of optical plane-parallel plates are obtained with an error of no more than 0.05λ. The dependences of the reflection coefficient on the longitudinal and transverse displacements of the surface are obtained. Graphic dependences shows that all surfaces of the studied samples have uniform distributions in the range from K = 19–20.2 %.

Keywords: interferogram, optical surface, Fizeau interferometer, reflection coefficient, Zernike polynomial, span, wedge-shaped plate

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