Reference for citation: Maiorov E. E., Arefiev A. V., Guliyev R. B., Pushkina V. P., Dagaev A. V. Study of a low-coherence interferometric probe operating in the scanning measurement mode. Journal of Instrument Engineering. 2024. Vol. 67, N 9. P. 790–797 (in Russian). DOI: 10.17586/0021-3454-2024-67-9-790-797.

Abstract. A low-coherence interferometric probe operating in the scanning measurement mode is presented. Data on the surface relief during the movement of the developed probe and the change in the path difference of the reference mirror in the interferometer arm are obtained. The functional diagram of the optical measuring unit and the scanning measurement mode are described, and the processing of signals from photodetectors is analyzed. A pattern of irregular wave fronts when low-coherence radiation falls on a rough surface, an intensity curve of the interference pattern when the surface relief changes along the OZ axis, and the results of measuring the amplitude and the envelope of the interference signal during defocusing are obtained.

Keywords: interferometric probe, profile, white light source, coherence length, roughness, interferometer branch, amplitude, envelop

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