TECHNOLOGICAL FEATURES OF CHOICE MATERIALS AND SPUTTERING METHODS FOR GYRO-DEVICES UNITS
Concern CSRI Elektropribor, JSC, Saint Petersburg, 197046, Russian Federation; Senior Researcher
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Abstract. The article considers the main principles of choice materials and sputtering methods of functional coatings as applies to gyro-devices units. These principles follow from technical requirements to product, its geometrical and functional features and physic-mechanical and thermo-physical properties of coating material.
Keywords:
thin-film coating, magnetron sputtering, thermic vacuum evaporation, position pickup, gyrodevice.
