TECHNOLOGICAL FEATURES OF CHOICE MATERIALS AND SPUTTERING METHODS FOR GYRO-DEVICES UNITS
Central Scientific Research Institute „Elektropribor“; Post-Graduate Student
Abstract. The article considers the main principles of choice materials and sputtering methods of functional coatings as applies to gyro-devices units. These principles follow from technical requirements to product, its geometrical and functional features and physic-mechanical and thermo-physical properties of coating material.
Keywords:
thin-film coating, magnetron sputtering, thermic vacuum evaporation, position pickup, gyrodevice.
