PIEZOELECTRIC DRIVE ON THE BASIS OF THIN-FILM PIEZOCERAMICS
ITMO University; docent
S. V. Bystrov
ITMO University, Saint Petersburg, 197101, Russian Federation; Associate professor
V. V. Grigoriev
ITMO University, Saint Petersburg, 197101, Russian Federation; Professor
D. . Obertov
Saint Petersburg National Research University of Information Technologies, Mechanics and Optics; postgraduate
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Abstract. The problem of mathematical modeling of piezoelectric drive on the basis of multilayered thin-film piezoceramics and experimental estimation of its fundamental characteristics are considered.
Keywords:
piezoelectric actuators, piezoelectric drive, characteristics of piezoceramics.
