PIEZOELECTRIC DRIVE ON THE BASIS OF THIN-FILM PIEZOCERAMICS
ITMO University; docent
S. V. Bystrov
ITMO University, Saint Petersburg, 197101, Russian Federation; Associate professor
V. . Grigoriev
ITMO University; Professor
D. . Obertov
Saint Petersburg National Research University of Information Technologies, Mechanics and Optics; postgraduate
Abstract. The problem of mathematical modeling of piezoelectric drive on the basis of multilayered thin-film piezoceramics and experimental estimation of its fundamental characteristics are considered.
Keywords: piezoelectric actuators, piezoelectric drive, characteristics of piezoceramics.