БЕСКАРДАННАЯ ИНЕРЦИАЛЬНАЯ СИСТЕМА ОРИЕНТАЦИИ НА ЭЛЕКТРОСТАТИЧЕСКИХ ГИРОСКОПАХ ДЛЯ ОРБИТАЛЬНОГО КОСМИЧЕСКОГО АППАРАТА
Concern “CSRI Elektropribor” JSC, Saint Petersburg, 197046, Russian Federation; Head of section
Abstract. Principle stages of theoretical investigations and practical developments of domestic micromechanical gyroscopes are reviewed. Achievements of Russian manufacturing companies and universities in creation of new generation of the sensors are described. Some peculiarities of the design accounting for specific character of applied materials and technologies are considered.
Keywords: micromechanical gyroscope, silicon, technology.