FORMATION OF SIO2/SI SYSTEM MORPHOLOGY UNDER THE ACTION OF EXCIMER LASER RADIATION
Quy Nhon University, Quy Nhon, Binh Dinh, 170 An Duong Vuong, Viet Nam, ; lecturer
A. M. Skvortsov
ITMO University, 197101, Saint Petersburg, Russian Federation; Professor
A. A. Petrov
ITMO University, 197101, Saint-Petersburg, Russian Federation; Associate professor
Abstract. Formation of micro-and nano-scale periodic structures on the surface of SiO2/Si system with the use of nanosecond laser pulses is investigated. Exposure of experimental samples to ultraviolet ArF laser pulse (193 nm) is shown to produce periodic wave-like structures on the surface. The dependence of the surface topology of SiO2/Si system on the laser pulse energy density and on the number of pulses is studied.
Keywords: nanosecond laser, nanostructuring, periodic structures, SiO2/Si system, optical microscopy, probe microscopy