ISSN 0021-3454 (print version)
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vol 67 / September, 2024
Article

DOI 10.17586/0021-3454-2016-59-5-400-406

MICROLENS ARRAY FABRICATION ON FUSED SILICA BY LIBBH TECHNOLOGY WITH CO2 LASER SMOOTHING

R. A. Zakoldaev
ITMO University, Department of Laser Technologies and Applied Ecology, St. Petersburg; Graduate Student


G. K. Kostyuk
ITMO University, Saint Petersburg, 197101, Russian Federation; Scientific Researcher


Сергеев М. М.
Университет ИТМО, Санкт-Петербург, 197101, Российская Федерация; научный сотрудник


Y. B. Yakovlev
ITMO University, Saint Petersburg, 197101, Russian Federation; Professor


V. V. Koval
ITMO University, Department of Laser Technologies; student


V. S. Rumkevich
ITMO University, Department of Laser Technologies; student


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Abstract. A new technology for microlens array fabrication is presented. The technology is based on creation of the initial microstructures on fused silica by laser indirect method, and the following reflow process of these structures made by CO2 laser action. Microlens arrays with diameter of microlens equal to 150 μm are fabricated. The focal length of microlens varies from 5 up to 5 mm. Profiles of formed microlens correspond to circle equation.
Keywords: fused silica microstructuring, microlens array, LIBBH, CO2 laser

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