DOI 10.17586/0021-3454-2016-59-5-400-406
MICROLENS ARRAY FABRICATION ON FUSED SILICA BY LIBBH TECHNOLOGY WITH CO2 LASER SMOOTHING
Университет ИТМО, кафедра лазерных технологий и экологического приборостроения, Санкт-Петербург; магистрант
Костюк Г. К.
Университет ИТМО, кафедра лазерных технологий и экологического приборостроения, Санкт-Петербург; старший преподаватель
Сергеев М. М.
Университет ИТМО, Санкт-Петербург, 197101, Российская Федерация; научный сотрудник
Яковлев Е. Б.
Университет ИТМО, Санкт-Петербург, 197101, Российская Федерация; профессор
Коваль В. В.
Университет ИТМО, кафедра лазерных технологий; студент
Рымкевич В. С.
Университет ИТМО, кафедра лазерных технологий; студент
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Аннотация. A new technology for microlens array fabrication is presented. The technology is based on creation of the initial microstructures on fused silica by laser indirect method, and the following reflow process of these structures made by CO2 laser action. Microlens arrays with diameter of microlens equal to 150 μm are fabricated. The focal length of microlens varies from 5 up to 5 mm. Profiles of formed microlens correspond to circle equation.
Ключевые слова: fused silica microstructuring, microlens array, LIBBH, CO2 laser
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