ISSN 0021-3454 (print version)
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9
Issue
vol 63 / September, 2020
Article

DOI 10.17586/0021-3454-2019-62-7-675-680

UDC 681.586

NEW TECHNOLOGICAL TECHNIQUE ENSURING RELIABILITY AND STABILITY OF OUTPUT PARAMETERS OF MICROMECHANICAL PRESSURE SENSORS

V. L. Tkalich
ITMO University; Professor


M. E. Kalinkina
ITMO University, Saint Petersburg, 197101, Russian Federation; Postgraduate


R. Y. Labkovskaya
ITMO University; student


A. G. Korobeynikov
Saint Petersburg Branch Organization of the Russian Academy of Sciences “Institute of Earth Magnetism, Ionosphere and Radio waves named after N.V. Pushkov RAS”;ITMO University, Saint Petersburg, 197101, Russian Federation ; Deputy Director for Science


O. I. Pirozhnikova
ITMO University; student


A. S. Kozlov
ITMO University, Department of Computer System Design and Security; Post-Graduate Student


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Abstract. A new technological method ensuring characteristics of reliability and stability of the output parameters of micromechanical pressure sensors is presented. The reliability parameters of sensitive elements of pressure sensors are calculated. Results of autonomous accelerated tests and tests for reliability are demonstrated.
Keywords: microelectromechanical systems, pressure sensors, sensing element

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