DOI 10.17586/0021-3454-2023-66-6-524-527
UDC 621.924.093; 381.53.08.519; 681.7.02
FEATURES OF ROUGHNESS EVALUATION OF OPTICAL SURFACES
ITMO University, Saint Petersburg, 197101, Russian Federation; Professor
S. V. Solk
Research Institute for Complex Testing of Optoelectronic Devices and Systems; Deputy Head of Department
L. A. Gluschenko
JSC “Scientific Research Institute for Optoelectronic Instrument Engineering”;
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Abstract. The need to introduce the root-mean-square roughness Rq into regulatory and design documents for optical surfaces is substantiated experimentally. It is noted that this parameter value makes it possible to estimate the energy losses associated with radiation scattering. The results of comparison of Rq and the arithmetic mean deviation of the profile Ra of optical surfaces, which are formed by polishing and diamond micro-turning, are presented. The absence of an unambiguous relationship between these characteristics is shown. The expediency of transition from 2D-metry to 3D-metry when normalizing and measuring roughness is observed; in particular, this is relevant in the case of a lack of symmetry in the roughness topography.
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