REDUCTION IN SURFACE ROUGHNESS OF A GLASS CERAMIC SUBSTRATE TO NANOMETER SIZE
Penza State Academy of Technology, Department of Computers and Computing Systems;
Скворцова И. Н.
Институт прикладной механики Уральского отд. РАН; аспирант
Abstract. Variation of surface roughness of standard glassceramics ST-50-1 substrate under the action of CO2 laser radiation is investigated. Operation conditions affording surface peaks size reduction down to 20 nm. Further reduction in the roughness is shown to be achievable to allow for formation of surface nanostructures. The problem of temporal stability of resulting surface characteristics is discussed. Control over topology of the surface being worked is performed with scanning sounding microscope Solver P47 Pro.
Keywords: nanostructure, sounding microscopy, action of radiation, glassceramics.