APPLICATION OF NANOIMPRINT LITHOGRAPHY TO MANUFACTURE NANO- AND MICROELEMENTS IN PHOTONICS
Университет ИТМО; научный сотрудник
I. Y. Denisyuk
ITMO University, Saint Petersburg, 197101, Russian Federation; Department head
Abstract. Manufacturing of polymer micro-optical elements by contact duplication with the use of flexible stamp is considered. The effect of shrinkage of UV-hardened composition on duplication accuracy is studied experimentally. Possibility of nano-sized structure duplication with existing equipment is confirmed by experiment with 1800 Grooves/mm diffraction grating.
Keywords: nanoimprint, contact lithography, nanostructure, photopolymer, siloxane.