ISSN 0021-3454 (print version)
ISSN 2500-0381 (online version)
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3
Issue
vol 60 / MARCH, 2017
Article
UDC 531.7.082.5:535.42/44

CONTROL OVER GEOMETRICAL PARAMETERS OF AN OBJECT BY LOCATION OF INFLECTION POINTS IN FRAUNHOFER DIFFRACTION PATTERN

Иванов А. Н.
Иванов Александр Николаевич;


Abstract. A method of estimation of object size by position of inflection points in the main maximum of diffraction pattern is proposed. The method is shown to possess a high sensitivity to variation of the object size and allows performing the measurements with accuracy of 0,1 microns.
Keywords: diffraction, inflection points, control of geometrical parameters.