CONTROL OVER GEOMETRICAL PARAMETERS OF AN OBJECT BY LOCATION OF INFLECTION POINTS IN FRAUNHOFER DIFFRACTION PATTERN
Иванов Александр Николаевич;
Abstract. A method of estimation of object size by position of inflection points in the main maximum of diffraction pattern is proposed. The method is shown to possess a high sensitivity to variation of the object size and allows performing the measurements with accuracy of 0,1 microns.
Keywords: diffraction, inflection points, control of geometrical parameters.