PRODUCTION OF THREE-DIMENSIONAL OPTICAL MICROSTRUCTURES WITH THE LASER ABLATION METHOD
Saint Petersburg National Research University of Information Technologies, Mechanics and Optics; postgraduate
I. Y. Denisyuk
ITMO University, Saint Petersburg, 197101, Russian Federation; Department head
Abstract. Peculiarities of application of laser engraving to micron-sized structure formation and production of optical microelements such as lattice micro-prism are investigated. Physical limitations on microstructure writing are discussed; examples of concrete elements production are presented.
Keywords: laser engraving, micro-optics, micro-prism array, ablation of polymers