PRODUCTION OF THREE-DIMENSIONAL OPTICAL MICROSTRUCTURES WITH THE LASER ABLATION METHOD
Saint Petersburg National Research University of Information Technologies, Mechanics and Optics; postgraduate
I. Y. Denisyuk
ITMO University, Saint Petersburg, 197101, Russian Federation; Professor, head of laboratory
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Abstract. Peculiarities of application of laser engraving to micron-sized structure formation and production of optical microelements such as lattice micro-prism are investigated. Physical limitations on microstructure writing are discussed; examples of concrete elements production are presented.
Keywords:
laser engraving, micro-optics, micro-prism array, ablation of polymers
