COMPUTER-ADDED HIGH-PERFORMANCE LASER INTERFEROMETER FOR TRANSPARENT FILMS THICKNESS MEASUREMENT
North-West State Technical University, Department of Physics, St. Petersburg; Post-Graduate Student
A. S. Ivanov
North-West State Technical University, Department of Physics, St. Petersburg;
V. V. Manukhov
North-West State Technical University, Department of Physics, St. Petersburg; Post-Graduate Student
A. B. Fedortsov
North-West State Technical University, Department of Physics, St. Petersburg; Professor
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Abstract. Principles of interferometric measurement of transparent layer thickness are formulated. A description of optical-mechanical tract, electronic circuit, and software of a modernized interferometer is given. Mathematical justification of the measurement principles and electronic scheme of the signal registration are presented. A PC program for data processing is described in details.
Keywords:
thin film, interferometer, laser, optic schematic, signal processing
