ISSN 0021-3454 (print version)
ISSN 2500-0381 (online version)
Menu

7
Issue
vol 60 / JULY, 2017
Article
UDC 531.7.082.5: 535.42

DIFFRACTION METHODS FOR CONTROL OF OBJECT POSITION

Иванов А. Н.
Иванов Александр Николаевич;


V. E. Kireyenkov
ITMO University, Department of Optical Devices Computerization and Design; Post-Graduate Student


M. D. Nosova
ITMO University, Department of Optical Devices Computerization and Design; Post-Graduate Student


Abstract. Diffraction methods adapted for measurement of object linear and angular movements are proposed. The phase inversion points are used for angle measurement, which allows for improvement in measurement sensitivity up to 0,05".
Keywords: diffraction, phase, measurement