DIFFRACTION METHODS FOR CONTROL OF OBJECT POSITION
ITMO University;
V. E. Kireyenkov
ITMO University, Department of Optical Devices Computerization and Design; Post-Graduate Student
M. D. Nosova
ITMO University, Department of Optical Devices Computerization and Design; Post-Graduate Student
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Abstract. Diffraction methods adapted for measurement of object linear and angular movements are proposed. The phase inversion points are used for angle measurement, which allows for improvement in measurement sensitivity up to 0,05".
Keywords:
diffraction, phase, measurement
