IMPROVEMENT OF LASER THERMOCHEMICAL RECORDING ON THIN CHROMIUM FILMS USING REPEATED PROCESSING
State Educational Establishment of High Professional Education “Saint-Petersburg State University of Information Technologies, Mechanics and Optics”; Professor
D. A. Sinevy
St. Petersburg National Research University of Information Technologies, Mechanics and Optics, Department of Laser Technologies and Ecological Engineering; Post-Graduate Student
Abstract. A method for improvement of spatial resolution of planar structures produced by repeated local laserinduced oxidation of thin chromium film and subsequent etching is investigated theoretically.
Keywords: laser-induced oxidation, diffractive optical elements, metallic film