IMPROVEMENT OF LASER THERMOCHEMICAL RECORDING ON THIN CHROMIUM FILMS USING REPEATED PROCESSING
State Educational Establishment of High Professional Education “Saint-Petersburg State University of Information Technologies, Mechanics and Optics”; Professor
D. A. Sinev
ITMO University, Saint Petersburg, 197101, Russian Federation; Associate Professor
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Abstract. A method for improvement of spatial resolution of planar structures produced by repeated local laserinduced oxidation of thin chromium film and subsequent etching is investigated theoretically.
Keywords:
laser-induced oxidation, diffractive optical elements, metallic film
