ISSN 0021-3454 (print version)
ISSN 2500-0381 (online version)
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11
Issue
vol 60 / NOVEMBER, 2017
Article
UDC 544.032.65

IMPROVEMENT OF LASER THERMOCHEMICAL RECORDING ON THIN CHROMIUM FILMS USING REPEATED PROCESSING

E. . Shakhno
State Educational Establishment of High Professional Education “Saint-Petersburg State University of Information Technologies, Mechanics and Optics”; Professor


D. A. Sinevy
St. Petersburg National Research University of Information Technologies, Mechanics and Optics, Department of Laser Technologies and Ecological Engineering; Post-Graduate Student


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Abstract. A method for improvement of spatial resolution of planar structures produced by repeated local laserinduced oxidation of thin chromium film and subsequent etching is investigated theoretically.
Keywords: laser-induced oxidation, diffractive optical elements, metallic film