ISSN 0021-3454 (print version)
ISSN 2500-0381 (online version)
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8
Issue
vol 60 / AUGUST, 2017
Article
UDC 620.179.118.4

ROUGHNESS MEASUREMENT OF PRECISION OPTICAL SURFACES BY THE INTERFERENCE MICROSCOPY METHOD

V. V. Azarova
National Research University Higher School of Economics, Department of Electronics and Telecommunications, Public Corporation M. F. Stelmakh Research Institute “Polius”, Moscow;


T. V. Tsvetkova
National Research University Higher School of Economics, Department of Electronics and Telecommunications; Public Corporation M. F. Stelmakh Research Institute “Polius”, Moscow; Post-Graduate Student; Engineer


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Abstract. Application of the incoherent interferometry method to measure random mean square value of surface roughness of precision optical elements is considered. The results of measurements with the use of the white light interferometer CCI-2000 by Taylor-Hobson are compared to data obtained by the stylus profiler NV-6200 by Zygo.
Keywords: precision optical surfaces, roughness, incoherent interferometry