Yegor Gavrilov
Work place: ITMO University
Post: Postgraduate
E-mail: gavrilov@elifom.ru
Post: Postgraduate
E-mail: gavrilov@elifom.ru
Kirillovsky Vladimir K., Yegor Gavrilov, Zhevlakov P Alexander APPLICATION OF COMPUTER ISOPHOTOMETRY FOR CHECKING OF OBJECTIVE FOR
NANOLITHOGRAPHY
The article was published in issue1(54) за 2011
The article was published in issue1(54) за 2011
