APPLICATION OF COMPUTER ISOPHOTOMETRY FOR CHECKING OF OBJECTIVE FOR NANOLITHOGRAPHY
State Educational Establishment of High Professional Education “Saint-Petersburg State University of Information Technologies, Mechanics and Optics”; Professor
Y. . Gavrilov
ITMO University; Postgraduate
P. A. Zhevlakov
ITMO University, Saint Petersburg, 197101, Russian Federation; leading engineer
Abstract. Quality control of optical surface finishing for modern Schwarzschild reflecting objectives operating in the EUV spectral range is shown to call for direct photometry of image structure. The method of isophotometry of point test object image allows to overcome restrictions caused by insufficient sensitivity of diffraction interferometry.
Keywords: nanolithography, reflecting objective, interferometry, computer isophotometry.