ISSN 0021-3454 (print version)
ISSN 2500-0381 (online version)
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9
Issue
vol 60 / SEPTEMBER, 2017
Article
UDC 535.317.2

APPLICATION OF COMPUTER ISOPHOTOMETRY FOR CHECKING OF OBJECTIVE FOR NANOLITHOGRAPHY

V. K. Kirillovsky
State Educational Establishment of High Professional Education “Saint-Petersburg State University of Information Technologies, Mechanics and Optics”; Professor


Y. . Gavrilov
ITMO University; Postgraduate


P. A. Zhevlakov
ITMO University, Saint Petersburg, 197101, Russian Federation; leading engineer


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Abstract. Quality control of optical surface finishing for modern Schwarzschild reflecting objectives operating in the EUV spectral range is shown to call for direct photometry of image structure. The method of isophotometry of point test object image allows to overcome restrictions caused by insufficient sensitivity of diffraction interferometry.
Keywords: nanolithography, reflecting objective, interferometry, computer isophotometry.