Zhevlakov P Alexander
Work place: ITMO University, Saint Petersburg, 197101, Russian Federation
Post: leading engineer
Degree: PhD
E-mail: zhevlakov_43@mail.ru
Post: leading engineer
Degree: PhD
E-mail: zhevlakov_43@mail.ru
Kirillovsky Vladimir K., Yegor Gavrilov, Zhevlakov P Alexander APPLICATION OF COMPUTER ISOPHOTOMETRY FOR CHECKING OF OBJECTIVE FOR
NANOLITHOGRAPHY
The article was published in issue1(54) за 2011
The article was published in issue1(54) за 2011
