ISSN 0021-3454 (print version)
ISSN 2500-0381 (online version)
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Author

Evgeny V. Spesivtsev

Work place: Institute of Semiconductor physics, Siberian Branch, Russian Academy of Sciences, Laboratory of Ellipsometry
Degree: Cand. Techn. Sci
E-mail: evs@isp.nsc.ru
Vasily A. Shvets, Sergey V. Rykhlitskii, Evgeny V. Spesivtsev, Nikolay N. Mikhailov IN SITU ELLIPSOMETRY OF GROWING MCT-BASED NANOSCALE HETEROSTRUCTURES
The article was published in issue6(52) за 2009