FORMATION OF REGULAR MICRORELIEF ON SOLID SURFACE WITH SHARPLY FOCUSED BEAM OF HEAVY IONS
Saint Petersburg National University of Information Technologies, Mechanics and Optics, Saint Petersburg, Russia; Professor
A. A. Shmidberskaya
Tyumen State University, Department of Micro and Nanotechnology; Master Sci.
Abstract. The process of groove profile formation on solid surface under the action of sharply focused beam of heavy ions is studied. Main parameters of the process affecting the formatted grove geometry characteristics are determined.
Keywords: regular microrelief formation, sharply focused beam of heavy ions, groove profile, ion spray coefficient