ISSN 0021-3454 (print version)
ISSN 2500-0381 (online version)
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Author
int(1712)

Yegor Gavrilov

Work place: ITMO University
Post: Postgraduate
E-mail: gavrilov@elifom.ru
Kirillovsky Vladimir K., Yegor Gavrilov, Zhevlakov P Alexander APPLICATION OF COMPUTER ISOPHOTOMETRY FOR CHECKING OF OBJECTIVE FOR NANOLITHOGRAPHY
The article was published in issue1(54) за 2011