DOI 10.17586/0021-3454-2016-59-9-787-789
UDC 681.5
AUTOMATIC CLIMATE CONTROL IN PRODUCTION FACILITIES BASED ON THE IMPLEMENTATION PROCEDURES OF FUZZY REGULATION
St. Petersburg State University of Aerospace Instrumentation, Department of Innovation and Integrated Quality Systems; Post-Graduate Student
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Abstract. Results of mathematical modeling of the process of climate parameters control in the manufacturing of microelectronics under non-stationary disturbances are presented. It is shown that loss of efficiency of PID control can be compensated with the use of a climate control system incorporating fuzzy controller and recurrent estimation device.
Keywords: automatic control system, microclimate parameters, microelectronics, quality management
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