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vol 64 / July , 2021
Article

DOI 10.17586/0021-3454-2016-59-10-884-887

UDC 681.5

DYNAMIC MODEL OF DUST CONCENTRATION FOR AUTOMATIC CONTROL SYSTEM OF MICROELECTRONICS PRODUCTION

N. A. Aleshkin
St. Petersburg State University of Aerospace Instrumentation, Department of Innovation and Integrated Quality Systems; Post-Graduate Student


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Abstract. A refined model of behavior of dust concentration as a climatic parameter of the air of a clean room in microelectronics production enterprise is developed. The adequate simulation model of the climate dynamical system is based on presented mathematical description of the parameter. Results obtained in MATLAB using the developed model confirm the effectiveness of fuzzy control of climate system under unpredictable disturbances when traditional PID controllers are buckling.
Keywords: automatic control system, parameters of microclimate, microelectronics, quality management, clean room

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