DOI 10.17586/0021-3454-2017-60-4-347-352
UDC 004.942
DETERMINING COORDINATES OF LOCAL MAXIMA OF LIGHT SIGNAL INTENSITY IN DIFFRACTION PATTERN OF THE SURFACE WITH PERIODIC STRUCTURE
St. Petersburg Institute for Informatics and Automation of the Russian Academy of Sciences, Laboratory of Information Technologies in System Analysis and Modeling;
E. L. Lebedev
A. F. Mozhaisky Military Space Academy, Department of Quality Control and Weapon Testing; Associate Professor
A. V. Mikhailenko
A. F. Mozhaisky Military Space Academy, Department of Quality Control and Weapon Testing; Adjunct
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Abstract. An automatic searching method for local maxima of light intensity distribution along diffraction pattern image is presented. The proposed approach consists in slicing the initial intensity oscillation diagram by approximation function for average values so that the required diffraction peaks will lie above the approximating curve, and therefore the local extrema can be found with any algorithm searching for maximum in an uninterrupted segment. Calculated coordinates of local maxima can be used for determining geometrical parameters of periodical structures with the double Fourier transform method. The method is recommended for the use in automatic quality control.
Keywords: local maxima, physical structure, Fourier transform, diffraction pattern, quality control
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