DOI 10.17586/0021-3454-2017-60-8-797-800
UDC 658.512.2-52
METHODS AND MEANS OF CONTROL OF THE DYNAMIC CHARACTERISTICS OF INERTIAL MICROMECHANICAL SENSORS AND MODULES
State Research Center of the Russian Federation Concern CSRI Elektropribor, JSC; ITMO University, Saint Petersburg, 197101, Russian Federation; Professor, Chief Metrologist, Head of the Department
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Abstract. An experience in development of complex specialized bench equipment to control frequency characteristics of the MEMS gyroscopes, accelerometers, and inertial based-on modules is described. Analyzes Peculiarities of the stands structures is analyzed, some trends in further development of stands are discussed.
Keywords: test bench, control, accuracy, frequency characteristics, micromechanics, gyroscope, accelerometer
References:
References:
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- Chekmarev A.B, Gryazin D.G. Mehatronika, Avtomatizacia, Upravlenie (Mechatronics, Automation, Control), 2013, no. 10, pp. 51–58. (in Russ.)
