ISSN 0021-3454 (print version)
ISSN 2500-0381 (online version)

vol 64 / April, 2021

DOI 10.17586/0021-3454-2018-61-9-796-804

UDC 681.786, 681.5.011, 681.2-5


A. V. Vasilieva
ITMO University, Department of Optical-Electronic Devices and Systems; Post-Graduate Student

A. S. Vasiliev
ITMO University ; Postgraduate

E. A. Sycheva
ITMO University, Saint Petersburg, 197101, Russian Federation; Teaching and Learning Specialist

V. V. Korotaev
ITMO University, Saint-Petersburg, 197101, Russian Federation; Full Professor

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Abstract. The full cycle of research and development of a high-precision absolute linear position sensor based on standard line measure is presented. The sensor uses a standard line measure of invar alloy, which is an incremental scale with 1 mm interval between strokes. Absolute measurements are realized using a magnetic channel for numbering of strokes and an optical channel for precise estimation of current sensor position. An image processing algorithm for calculating position in real time is developed. A three-step calibration proce-dure used to eliminate the systematic measurement error is described. According to performed test measurements, the developed sensor has an accuracy of 1.65 μm (3 standard deviations) at a speed of up to 3 m/s. Application of a standard line measure is noted as the main advantage of the development, which ensures unification and compatibility with standard metrology equipment. 
Keywords: linear position sensor, high-precision measurements, standard line measure, optical measurements, absolute positioning

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