DEVELOPMENT OF INTERFERENCE COATING WITH IMPROVED MECHANICAL PROPERTIES ON THE BASE OF MIXED FILMS
ITMO University, 197101, Saint-Petersburg, Russian federation; Professor
V. A. Zverev
ITMO University, Department of Optical Technologies; Post-Graduate Student
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Abstract. The possibility of creation of new film-forming materials with improved non-optical properties (such asadhesion to a substrate, mechanical stress, hardness, etc.) is considered.
Keywords:
mixed films, vacuum deposition, mechanical stress, adhesion, micro hardness
