NONLINEAR FACTORS EFFECT ON DYNAMICS OF MICROMECHANICAL GYROSCOPE WITH TWO-MASS SENSITIVE ELEMENT
St. Petersburg State University of Aerospace Instrumentation, Department of Mechanics; Professor
A. V. Yefimovskaya
St. Petersburg State University of Aerospace Instrumentation, Department of Mechanics; Post-Graduate Student
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Abstract. Effects of nonlinear factors on dynamics of single-mass and two-mass microelectromechanical (MEMS) gyroscopes are analyzed. Higher consistency of two-mass MEMS gyroscope performance as compared with single-mass one is justified.
Keywords:
MEMS gyroscope, nonlinear factors, consistency of performance, frequency response
