Sergey V. Rykhlitskii
Work place: Institute of Semiconductor physics, Siberian Branch, Russian Academy of Sciences, Laboratory of Ellipsometry
Degree: Cand. Techn. Sci
E-mail: rhl@isp.nsc.ru
Degree: Cand. Techn. Sci
E-mail: rhl@isp.nsc.ru
Vasily A. Shvets, Sergey V. Rykhlitskii, Evgeny V. Spesivtsev, Nikolay N. Mikhailov IN SITU ELLIPSOMETRY OF GROWING MCT-BASED NANOSCALE HETEROSTRUCTURES
The article was published in issue6(52) за 2009
The article was published in issue6(52) за 2009
