ISSN 0021-3454 (print version)
ISSN 2500-0381 (online version)
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Author
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Zhevlakov P Alexander

Work place: ITMO University, Saint Petersburg, 197101, Russian Federation
Post: leading engineer
Degree: PhD
E-mail: zhevlakov_43@mail.ru
Kirillovsky Vladimir K., Yegor Gavrilov, Zhevlakov P Alexander APPLICATION OF COMPUTER ISOPHOTOMETRY FOR CHECKING OF OBJECTIVE FOR NANOLITHOGRAPHY
The article was published in issue1(54) за 2011