ISSN 0021-3454 (print version)
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vol 67 / February, 2024
Article

DOI 10.17586/0021-3454-2020-63-1-18-25

UDC 004.627

METHOD OF BALANCING THE SENSITIVE ELEMENT OF MICROMECHANICAL PENDULUM ACCELEROMETER

B. T. Doan
ITMO University, Saint Petersburg, 197101, Russian Federation; Postgraduate


A. A. Tropchenko
ITMO University, Saint Petersburg, 197101, Russian Federation; Associate Professor


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Abstract. A method of balancing the sensitive element of pendulum accelerometer by laser evaporation of a metal is presented. The process of adjusting the balancing load of the micromechanical accelerometer for the lower and upper positions of the sensor element in relation to the vertical is considered. A physi-cal pendulum serves as a sensitive element of the device. When using a micromechanical pendulum accelerometer as a sensor, the threshold sensitivity determines the sensitivity of the micromechanical accelerometer to the slope of the base in the field of gravity. Calculated formulas for the lower and upper positions of the pendulum are derived. For the practical implementation of this method, it is proposed to use the technology of laser evaporation of material from the surface of the balancing load.
Keywords: sensitive element, micromechanical accelerometer, pendulum accelerometer, center of mass, laser evaporation

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