DATA CHARACTERISTICS OF THE MICROMECHANICAL GYROSCOPES BASED ON SILICON TECHNOLOGY MICROELECTROMECHANICAL SYSTEMS
St. Petersburg State University of Aerospace Instrumentation, Department of Aerospace Instruments of Orientation, Navigation and Stabilization; Professor; Head of Department
S. K. Zolotarev
Federal State Unitare Enterprise “Control Units Research Inctitute”; Head of Department
N. A. Ovchinnikova
St. Petersburg State University of Aerospace Instrumentation, Department of Aerospace Instruments of Orientation, Navigation and Stabilization; Assistent
A. I. Panferov
St. Petersburg State University of Aerospace Instrumentation, Department of Aerospace Instruments of Orientation, Navigation and Stabilization;
V. K. Ponomarev
St. Petersburg State University of Aerospace Instrumentation, Department of Aerospace Instruments of Orientation, Navigation and Stabilization;
Read the full article
Abstract. General data characteristics of the different type of the micromechanical gyroscopes realized on silicon technology are analyzed. Give much attention to stabilization scale factor, frequency band, linearity and errors of transformation.
Keywords:
micromechanical gyroscopes, microelectromechanical systems
