OPTICAL-ELECTRONIC CONVERTER OF LINEAR DISPLACEMENT OF SUBMICRON ACCURACY
St. Petersburg National Research University of Information Technologies, Mechanics and Optics, Department of Optical Instruments Computerization and Design; Student
A. V. Prokofjev
ITMO University; Department of Optical-Electronic Devices and Systems;
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Abstract. An incremental optical-electronic converter of linear displacement of submicron accuracy is described. The converter is designed to be used in multi-axis machining equipment. Results of the converter accuracy measurement are presented.
Keywords:
linear displacements, opto-electronic encoder, incremental encoder, grating
