Natalia S. Potemina
Work place: ITMO University, Saint Petersburg,
197101, Russian Federation
Post: tutor
E-mail: kafins@mail.ru
Post: tutor
E-mail: kafins@mail.ru
Tkalich Vera L., Natalia S. Potemina, Korobeynikov Anatoliy Grigorievich, Pirozhnikova Olga I. ANALYSIS OF THE PROCESS OF THIN FILM DEPOSITION
IN VACUUM CHAMBERS BY HiPIMS METHOD
The article was published in issue3(64) за 2021
The article was published in issue3(64) за 2021
