ISSN 0021-3454 (print version)
ISSN 2500-0381 (online version)
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Author

Natalia S. Potemina

Work place: ITMO University, Saint Petersburg, 197101, Russian Federation
Post: tutor
E-mail: kafins@mail.ru
Tkalich Vera L., Natalia S. Potemina, Korobeynikov Anatoliy Grigorievich, Pirozhnikova Olga I. ANALYSIS OF THE PROCESS OF THIN FILM DEPOSITION IN VACUUM CHAMBERS BY HiPIMS METHOD
The article was published in issue3(64) за 2021