Abstract. Mathematical models of dynamics of elastic membrane sensitive elements in piezoresistive pressure microsensors are proposed. Modelling is carried out with the use of the method of finite elements by representing the membrane elastic sensitive element by an ensemble of triangular or quadrangular forms. The models account for viscous friction forces associated with the contact between the sensitive element and a viscoelastic adhesive layer. To confirm the proposed models adequacy, calculated model data are compared to results of experimental study. The developed mathematical models for the dynamics of elastic membrane sensitive elements are reported to provide high reliability and good competitiveness of this element base management systems. Created software package designed to work in modern computer environments allows to visualize the results obtained by mathematical modeling of the dynamics of elastic membrane of sensitive elements.

Keywords: membrane elastic sensitive elements, finite element method, complex influences, mathematical models of dynamics, piezoresistive pressure microsensors

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